Superconducting nano-striplines as quantum detectors

The recent progress in the nanofabrication of superconducting films opens the road toward detectors with highly improved performances. This is the case for superconducting nano-striplines where the thickness and the width are pushed down to the extreme limits to realize detectors with unprecedented sensitivity and ultra fast response time. In this way quantum detectors for single photons at telecommunication wavelengths and for macromolecules such as proteins can be realized. As is often the case in applied nanotechnology, it is a challenge to make devices with the necessary macroscopic dimensions that are needed to interface present technologies, while maintaining the performance improvements.For nano-stripline detectors, both the fast temporal response and the device sensitivity is generally degraded when the area is increased. Here, we present how such detectors can be scaled up to macroscopic dimensions without losing the performance of the nano-structured active elements by using an innovative configuration. In order to realize ultrathin superconducting film the nano-layer is growth with a careful setup of the deposition technique which guarantees high quality and thickness uniformity at the nano-scale size. The active nano-strips are defined with the state-of-the-art electron beam nanolithography to achieve a highly uniform linewidth. We present working detectors based on nano-strips with thicknesses 9–40 nm and widths of 100–1000 nm which exhibit unprecedented speed and area coverage (40 9 40 lm 2 for single photon detectors and 1 9 1 mm 2 for single molecule detectors) based on niobium nitride thus enabling practical use of this nanotechnology.