Tolerance analysis of interdigitated electrode based biosensor with respect to manufacturing parameters uncertainties

The finite element modeling is used to investigate the frequency behavior of an Inter-Digitated micro Electrode (IDE) array biosensor with respect to manufacturing tolerances for monitoring and recognition of bacterial cells. In particular, a Vertex Analysis procedure is used in order to assess the impact on the sensitivity of the biosensor of the tolerances affecting the most important geometrical characteristics. The electrostatic model leads to obtain the range of variability of the capacitance of the biosensor with respect to geometrical and physical parameters variations. The biosensor impedance in the frequency range between 1 Hz to 1 MHz is then analyzed through the electroquasistatic approximation of the Maxwell equations. The quantification of the induced variation may provide a reliable detection of pathogen bacteria and an enhanced production yield of the component