Sheet resistance measurements on sputteredCu-In layers were performed while varying the temperature in a cyclic way between room temperature and 150 °C. A hysteresis effect was observed which can be explained by a CuIn2 → Cu11In9phasetransformation taking place in the alloy during the thermal cycles. A model is proposed for the phasetransformation which is based on a diffusional mechanism. It is suggested that simple sheet resistance measurements made in the same system in which the metallic layers are deposited could be used to follow the phase formation and transformation in the alloy.
Kinetics of Phase Transformations in Sputtered Cu-In Alloy Films Studied by Electrical Measurements.
RUBINO, Alfredo
1995-01-01
Abstract
Sheet resistance measurements on sputteredCu-In layers were performed while varying the temperature in a cyclic way between room temperature and 150 °C. A hysteresis effect was observed which can be explained by a CuIn2 → Cu11In9phasetransformation taking place in the alloy during the thermal cycles. A model is proposed for the phasetransformation which is based on a diffusional mechanism. It is suggested that simple sheet resistance measurements made in the same system in which the metallic layers are deposited could be used to follow the phase formation and transformation in the alloy.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
