MEMS pressure sensors have emerged as crucial components in a wide range of applications, spanning from consumer to industrial sectors, where the demand for accurate and reliable sensing solutions has increased. However, they suffer from considerable sensitivity to temperature fluctuations, potentially leading to significant accuracy drift caused by thermal stresses. To address the above issue, this paper proposes a novel circuit design for real-time compensation of thermal drift, with enough low power and area requirements to be closely coupled with the MEMS. The circuit implements a custom HW accelerator of a neural network, capable of dynamically resolving accuracy drift by up to 1.6 hPa, and restoring the accuracy to within ±0.5 hPa range of correct operation. TSMC 130 nm CMOS synthesis results of the proposed system show an area of 0.0373 mm2 and a dynamic power consumption of 1.07 μ W. These results highlight the system’s integration potential toward a compact self-compensating sensor.

In-Sensor System for Real-Time Compensation of Thermal Drift in MEMS Pressure Sensors

Vitolo P.;Licciardo G. D.
;
Liguori R.;Di Benedetto L.;Rubino A.;
2024-01-01

Abstract

MEMS pressure sensors have emerged as crucial components in a wide range of applications, spanning from consumer to industrial sectors, where the demand for accurate and reliable sensing solutions has increased. However, they suffer from considerable sensitivity to temperature fluctuations, potentially leading to significant accuracy drift caused by thermal stresses. To address the above issue, this paper proposes a novel circuit design for real-time compensation of thermal drift, with enough low power and area requirements to be closely coupled with the MEMS. The circuit implements a custom HW accelerator of a neural network, capable of dynamically resolving accuracy drift by up to 1.6 hPa, and restoring the accuracy to within ±0.5 hPa range of correct operation. TSMC 130 nm CMOS synthesis results of the proposed system show an area of 0.0373 mm2 and a dynamic power consumption of 1.07 μ W. These results highlight the system’s integration potential toward a compact self-compensating sensor.
2024
978-3-031-48710-1
978-3-031-48711-8
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11386/4853713
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