This paper addresses the assessment of the variability of CMUT arrays’ electro-mechanical and acoustic performance, as related to the tolerance of the CMUT vertical dimensions due to the microfabrication process. A 3-factors 3-levels factorial sensitivity analysis is carried out to compute the main effects and the interaction effects of the moving plate thickness, the passivation layers thickness, and the sacrificial layer thickness, on the CMUT resonance frequency, collapse voltage, and static capacitance, as well as on the transmission and reception sensitivity amplitude and bandwidth and time delay in water-coupled condition. The analysis is performed by means of FEM simulations of the CMUT static behavior and dynamic response, and the findings are compared to experimental data.

Assessing the Microfabrication-Related Variability of the Performance of CMUT Arrays

Monica La Mura
;
Patrizia Lamberti;
2022-01-01

Abstract

This paper addresses the assessment of the variability of CMUT arrays’ electro-mechanical and acoustic performance, as related to the tolerance of the CMUT vertical dimensions due to the microfabrication process. A 3-factors 3-levels factorial sensitivity analysis is carried out to compute the main effects and the interaction effects of the moving plate thickness, the passivation layers thickness, and the sacrificial layer thickness, on the CMUT resonance frequency, collapse voltage, and static capacitance, as well as on the transmission and reception sensitivity amplitude and bandwidth and time delay in water-coupled condition. The analysis is performed by means of FEM simulations of the CMUT static behavior and dynamic response, and the findings are compared to experimental data.
File in questo prodotto:
File Dimensione Formato  
2022_OJUltrasonic_IEEE_Assessing_the_Microfabrication-Related_Variability_of_the_Performance_of_CMUT_Arrays.pdf

accesso aperto

Tipologia: Versione editoriale (versione pubblicata con il layout dell'editore)
Licenza: Creative commons
Dimensione 1.13 MB
Formato Adobe PDF
1.13 MB Adobe PDF Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11386/4860936
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? ND
social impact